| 摘要 |
Piezoelectric resistor elements (R) are formed on a single-crystal substrate (10), with each changing its resistance in accordance with the deformation. A strain generator (20) including a support (21) and an actuator (23) cause a mechanical deformation of the resistor elements in accordance with a displacement of the actuator with respect to the support. The force detector senses a force on the acutator in the form of changes in theresistance of the elements. The substrate surface, where resistor elements are formed, is such that the resistance coefficient is maximum in two orthogonal directions. If a plummet (30) is attached to the actutor, the acceleration against the plummet may be determined. With a magnetic member (330) attached to the actuator, it is possible to determine the magnetic force acting on the member. If magnetic force and acceleration detecting systems are combined for a compensating operation, a net magnetic force may eb determined without the influence of an acceleration. In either case, the magnitude of a measurement is determined along each axis of a three-dimensional coordinate system by properly arranging the resistor elements. |
