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发明名称
MANUFACTURE OF INTEGRATED CIRCUIT
摘要
申请公布号
JPH02271569(A)
申请公布日期
1990.11.06
申请号
JP19890092691
申请日期
1989.04.12
申请人
SUMITOMO ELECTRIC IND LTD
发明人
SASAKI GORO
分类号
H01L31/10;H01L27/14
主分类号
H01L31/10
代理机构
代理人
主权项
地址
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