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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH02270335(A)
申请公布日期
1990.11.05
申请号
JP19890090621
申请日期
1989.04.12
申请人
TOSHIBA CORP
发明人
FUKUDA ETSUO
分类号
H01L29/78;H01L21/322;H01L21/336
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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