| 摘要 |
PURPOSE:To accurately and easily match a focus with a joint part border surface by adjusting the focus in a Y-Z plane by adjusting the positions of a probe and a body to be inspected, and adjusting the focus in an X-Z plane with a delay pattern. CONSTITUTION:Array vibrator groups 3A and 3B are arranged at symmetrical positions to constitute the probe 4, the positions of the probe 4 and body 2 to the inspected are adjusted to focus ultrasonic wave beams 6A and 6B on a line F-F' passing the joint surface S in the Y-Z plane, and the delay times of delay networks 11 and 16 are so set as to focus the beams 6A and 6B on the line F-F' in an X-Z plane. Then the vibrator group 3A is excited to make a beam 6A1 incident on the body 2 and the beam is propagated as transverse wave and the beam 6B1 reflected on the joint surface S is made incident on the vibrator group 3B and amplified 14 and delayed 16 to display an image on a display device 20. Similarly, a beam 6A2 is emitted and its reflected wave is displayed as an image. Consequently, the spot-shaped focus of a beam is matched with the joint part border surface, the line F-F' is scanned electronically to inspect the border surface. |
