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发明名称
CLEANING METHOD
摘要
申请公布号
JPH02268879(A)
申请公布日期
1990.11.02
申请号
JP19890088123
申请日期
1989.04.10
申请人
MITSUBISHI HEAVY IND LTD
发明人
KAWAKAMI TAKASHI
分类号
B08B3/10;C23G3/00;C23G5/04;H01J9/02
主分类号
B08B3/10
代理机构
代理人
主权项
地址
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