HEAT-SINK STRUCTURES WITH INCREASED HEAT DISSIPATION CAPACITY AND METHODS FOR THE PRODUCTION OF SUCH STRUCTURES

摘要

A porous or non-woven structure of high thermally conductive ceramic particles is embedded in a matrix of thermally conductive ceramics to provide a heat-sink substrate. Particular application to AlN heat-sinks. Embedding is provided by infiltration by dense ceramics under CVD conditions. In an embodiment the particles are whiskers coated with a diamond layer.