发明名称 |
Wafer hanger useful for thermally treating semiconductor wafers |
摘要 |
A wafer hanger has a rod member and a supporting member. The rod member is inserted into respective notches formed in semiconductor wafers, and then placed on the supporting member. The wafer hanger holding the wafers is put into a furnace for heat treatment of the wafers. Since the wafers are hung from the rod member, plastic deformation due to the gravity of the wafers is not caused in the wafers.
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申请公布号 |
US4966549(A) |
申请公布日期 |
1990.10.30 |
申请号 |
US19890424826 |
申请日期 |
1989.10.20 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
OHDATE, MITUO |
分类号 |
H01L21/22;C30B25/12;C30B31/14;H01L21/673 |
主分类号 |
H01L21/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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