| 摘要 |
PURPOSE:To obtain desirable core material for a magnetic head having high magnetic flux saturation density and low coersive force by constituting the material of Fe, N, and at least one or more kinds of element out of Co, Ni, and Ru, and setting the composition in a specified range. CONSTITUTION:The composition formula of a soft magnetic thin film is shown by FeaBbNc (where a, b and c represent atomic percent, and B expresses at least one or more kinds of Co, Ni, and Ru), and the composition is set in the range of 0<b<=5, 0<c<=5. The above soft magnetic thin film is manufactured, for example, as follows; by vapor phase deposition method like RF sputtering method, an amorphous thin film having the above specified composition is obtained, said thin film is subjected to heat treatment preferably at 220 to 450 deg.C, and a part of the amorphous thin film or the whole part thereof is crystallized. The grain diameter is made perferably less than or equal to 500Angstrom . Further, preferably, the above heat treatment is performed in a magnetic field, thereby inducing uniaxial magnetic anisotropy; a part of or the whole part of the above amorphous thin film is crystallized, thereby manufacturing the title film.
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