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经营范围
发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02256239(A)
申请公布日期
1990.10.17
申请号
JP19890077860
申请日期
1989.03.29
申请人
HITACHI LTD
发明人
OWADA NOBUO
分类号
H01L21/3205;H01L21/28;H01L21/285;H01L21/321;H01L21/60
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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