| 摘要 |
PURPOSE:To quantitatively detect the deviation in the laser light focal position generated during processing by continuously measuring the temp. distribution on a plane mirror disposed to the optical axis of the laser light without contact during the processing. CONSTITUTION:The laser light generated from a laser oscillator is condensed to a work by the plane mirror 5 and a condenser mirror 2 to process the work. The temp. distribution of the plane mirror 5 is detected continuously without contact by an IR camera 6 during this processing and is recorded as an image pattern by an image processor 7 which quantitatively determines the rate of the deviation of the focal position of the laser light by the difference from a reference value. The optical axis position is checked without interrupting the operation in such a manner, by which the working rate and processing accuracy of the device are improved. |
