| 摘要 |
PURPOSE:To enable a highly integrated device to he produced with improved yield by attracting and fixing a cap for covering and a spin cup through a magnet member. CONSTITUTION:A cap for covering 4 and a spin cup 3 are attracted and fixed through a magnet member. 10. Therefore. since a nozzle 6 is securely placed at the cap for covering 4 without deviating from a preset position without being affected by rotary vibration of a spin chuck 2. a resist treating process is not affected poorly. Since the cap for covering 4 is attracted and fixed to the same setting position of the spin cup 3 through the magnet member 10. the resist treating process is performed with high accuracy. Thus. a highly integrated device can be produced with improved yield. |
