| 摘要 |
<p>PURPOSE:To obtain a sensor which is free from disconnection and is easily sealed and has a stable output by constituting an exothermic resistor and a thermometric resistor of a Pt thin film in the center part of an insulating round bar and Pt thin films for output terminals in both end parts. CONSTITUTION:A Pt thin film line 11 is formed on the center part of an insulating round bar 10 by sputtering, and Pt thin films for output terminals are formed on both end parts by coating. Resistance values are trimmed by a laser to obtain an exothermic resistor and a thermometric resistor 13. Two round bars 10 are inserted through a fluid tube 3, and through parts are sealed with O rings. Thus, disconnection during assembling does not occur because each resistor 13 is mad of the Pt thin film. Since insulating rods 10 are inserted through the fluid tube, sealing is facilitated. Further, since Pt thin films are formed on the round bar 10, they are completely brought into contact with each other, and heat does not flow in and out to obtain the stable output.</p> |
