| 摘要 |
PURPOSE:To allow the uniform cleaning even if a component has a complex- shaped portion by providing a magnetic field generating means locally activating plasma for an electric discharge cleaning means by the magnetic field. CONSTITUTION:Permanent megnets 7 are provided on both sides of the groove section 6 of an electric discharge cleaning device. Thereby, the plasma density is increased along the groove section 6 by the action of the magnetic field crossing the groove section 6 at right angles and the electric field in the bottom direction of the groove section 6, iso-density lines l3, l2, l1 enter the groove section 6, and iso-density lines l5, l4 with the higher density are formed. Accordingly, side walls of the groove section 6 is cleaned by the plasma thus activated.
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