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发明名称
EXPOSURE APPARATUS
摘要
申请公布号
EP0284414(A3)
申请公布日期
1990.10.10
申请号
EP19880302671
申请日期
1988.03.25
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人
OGAWA, KAZUFUMI;ENDO, MASAYUKI;SASAGO, MASARU;ISHIHARA, TAKESHI
分类号
G02B3/00;G02B1/02;G02B13/14;G02B13/24;G03F7/20;H01L21/027;H01L21/30;(IPC1-7):G02B13/14;G03B41/00
主分类号
G02B3/00
代理机构
代理人
主权项
地址
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