摘要 |
PURPOSE:To effectively transmit a transfer clock pulse by integrally forming transfer electrode group at one end. CONSTITUTION:The first phase transfer clock pulse phi1 is applied to the first phase transfer electrodes 10a-10d. The second phase transfer clock pulse phi2 is applied to the second phase transfer electrodes 11a-11d. Signal charge obtained at photoelectric converters 1a-1d is transferred in parallel through a transfer control electrode 6 to the electrodes 10a-10d. The electrodes 11a-11d and 10a- 10d are integrally formed in the region along a transfer channel region 9. The connecting parts 7a-7d, 8a-8d of the electrodes 10a-10d and 11a-11d to metal wirings 4, 5 which supply clock pulses are arranged at opposite side to the elements 1a-1d. |