摘要 |
PURPOSE:To find local void rate distributions over the entire section of a measured part by irradiating the entire surface of the measured part where a two- phase current flows with a radiation, and measuring the whole range of a transmitted radiation through a CCD video element. CONSTITUTION:An X-ray beam 4 from a radiation source 2 is converged by a collimator 5 to travel to the whole range of the measured part 1 and the CCD video element 10 for intensity comparison and correction. The X-ray beam 4 transmitted through the measured part 1 is varied in intensity according to the state of the two-phase current and transmitted through the light shield plate 17 of the CCD video element 9 to strike each unit semiconductor element 11, where charges corresponding to the intensity are accumulated. Then, when pulses 13 are sent from a clock pulse oscillator 12 to elements 11 in order, the elements 11 output currents 14 corresponding to the amounts of accumulated charges to a preamplifier 15. On the other hand, the CCD video element 10 for intensity comparison and correction receives the X-ray beam 4 directly from the radiation source 2 and outputs an output current 18 corresponding to its intensity to the preamplifier 15. Then, variation in the intensity of the X-ray beam with time is corrected. |