PLASMA CVD APPARATUS,申请号JP19890073124-传众专利搜索

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发明名称	PLASMA CVD APPARATUS
摘要
申请公布号	JPH02250314(A)	申请公布日期	1990.10.08
申请号	JP19890073124	申请日期	1989.03.23
申请人	MITSUBISHI ELECTRIC CORP	发明人	NAKAO SHUJI
分类号	H01L21/205;H01L21/31	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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