发明名称 SENSOR ELEMENT
摘要 Sensor element, especially for pressure sensors, comprising a first membrane mounted in a rigid frame, said first membrane being in pressure communication with two volumes between which a pressure difference is to be measured. The sensor element comprises at least one second membrane being surrounded by the first membrane, said second membrane having, at least by the transition zone between the first and the second membrane, a stiffness being less than the stiffness of the first membrane.
申请公布号 WO0055589(A1) 申请公布日期 2000.09.21
申请号 WO2000NO00053 申请日期 2000.02.11
申请人 SINTEF;ROGNE, HENRIK;WANG, DAG, TORSTEIN 发明人 ROGNE, HENRIK;WANG, DAG, TORSTEIN
分类号 G01L9/00;G01L19/06;(IPC1-7):G01L9/00 主分类号 G01L9/00
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