发明名称 |
SENSOR ELEMENT |
摘要 |
Sensor element, especially for pressure sensors, comprising a first membrane mounted in a rigid frame, said first membrane being in pressure communication with two volumes between which a pressure difference is to be measured. The sensor element comprises at least one second membrane being surrounded by the first membrane, said second membrane having, at least by the transition zone between the first and the second membrane, a stiffness being less than the stiffness of the first membrane.
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申请公布号 |
WO0055589(A1) |
申请公布日期 |
2000.09.21 |
申请号 |
WO2000NO00053 |
申请日期 |
2000.02.11 |
申请人 |
SINTEF;ROGNE, HENRIK;WANG, DAG, TORSTEIN |
发明人 |
ROGNE, HENRIK;WANG, DAG, TORSTEIN |
分类号 |
G01L9/00;G01L19/06;(IPC1-7):G01L9/00 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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