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发明名称
SUSCEPTOR FOR VAPOR GROWTH DEVICE
摘要
申请公布号
JPH02248393(A)
申请公布日期
1990.10.04
申请号
JP19890068540
申请日期
1989.03.20
申请人
TOSHIBA MACH CO LTD
发明人
KOBAYASHI TAKEHIKO;GOTO TAISAN
分类号
C30B25/12;H01L21/205
主分类号
C30B25/12
代理机构
代理人
主权项
地址
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