| 摘要 |
PURPOSE:To obviate the leakage of pattern correction by correcting even the inspection patterns at every correction of a segment pattern and visibly displaying the corrected pattern. CONSTITUTION:For example, the patterns are broken down respectively to 3 pieces of the patterns PF 1 to PF 3, PL 1 to PL 3 in such a manner that the operation to correct the pattern width of the inspection patterns and the checking of the leakage from the connections of the inter-pattern spacings can be made. The width (a) of the pattern PL 1 is corrected to a width W in the case of unifying the segment pattern width to the width W and the PF 1 is of the width W from the beginning and is, therefore, not changed by the correction. The width (b) of the pattern PL 2 and the width (c) of the PF 3 are similarly expanded respectively to the W. The spacings (e), (f) below the threshold based on the spacing D are connected in succession thereto. The corrected inspection patterns are thereafter printed and outputted. The missing of the correction is thus visually checked. |
