| 摘要 |
PURPOSE:To enable a mirror of this design to have an excellent reflectivity and a heat-resistant property by a method wherein a surface-polished silicon carbide thin film is formed on the surface of an isotropic carbon material, which is made to serve as a laser reflective mirror base, and a cooling member is provided to the face of the mirror base opposite to the reflective mirror face. CONSTITUTION:A polished mirror surface 2 of a silicon carbide layer is formed on a carbon base 1 to form a reflective mirror base 3, and a flow path 5 of cooling fluid is provided to the side of the mirror base 3 opposite to the mirror surface 2 through the intermediary of a metal plate 4. The flow path 5 and the metal plate 4 are previously formed in an integral structure, and the metal plate 4 and the base 1 are joined together through an optional method. Various types of bonding methods that carbon material and metal are bonded together are used as the bonding method concerned. For instance, metal such as copper, oxygen free copper specially preferable, copper alloy, stainless steel, carbon steel, or the like is jointed to carbon or silicon carbide. Moreover, a metal case 7 provided with a flow path 6 is provided to the side opposite to a reflective surface, whereby a cooling effect can be improved. |
