| 摘要 |
PURPOSE:To uniformly stabilize, in a longitudinal direction, a microwave discharge plasma generated in a discharge space and to execute a high-efficiency and large-output laser operation by a method wherein a reflection member which reflects microwaves is arranged and installed in a microwave transmission path through which the microwaves are transmitted. CONSTITUTION:Three waveguide parts 31 which reflect microwaves are arranged and installed in a horn waveguide 3 as one microwave transmission path; accordingly, microwaves which have been oscillated from a magnetron 1 as a microwave oscillator are propagated through a waveguide 2 and the horn waveguide 3; when their impedance is matched through a microwave coupling window 4 and they are transmitted to a laser head part 6, one part of the microwaves is reflected by the waveguide parts 31 and a distribution of a microwave electromagnetic field in the born waveguide 3 is changed. During this process, an insertion rate of the three waveguide posts 31 is adjusted in such a way that a part whose electric field is weak at the laser head part 6 becomes strong and that a part whose electric field is strong becomes weak, thereby, a distribution of the electric field of the microwaves at the laser head part 6 becomes uniform. |
