MANUFACTURING DEVICE FOR SEMICONDUCTOR DEVICE,申请号JP19900282490-传众专利搜索

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发明名称	MANUFACTURING DEVICE FOR SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH04155920(A)	申请公布日期	1992.05.28
申请号	JP19900282490	申请日期	1990.10.19
申请人	NEC YAMAGATA LTD	发明人	ISHIZAKI KATSUTOSHI
分类号	C23C14/50;H01L21/203;H01L21/285;H01L21/324	主分类号	C23C14/50
代理机构		代理人
主权项
地址

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