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发明名称
PROCEDIMENTO PER L'ELIMINAZIONE DELLA CONTAMINAZIONE DA CLURO DI SUBSTRATI SEMICONDUTTORI
摘要
申请公布号
IT1224181(B)
申请公布日期
1990.09.26
申请号
IT19870006618
申请日期
1987.07.06
申请人
S.G.S. MICROELETTRONICA SPA ORA S.G.S.-THOMSON MICROELETTRONICS SPA
发明人
LANZA PAOLO;VASQUES PATRIZIA
分类号
H01L;(IPC1-7):H01L/
主分类号
H01L
代理机构
代理人
主权项
地址
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