| 摘要 |
PURPOSE:To prevent the breaking of an X-ray transmissive window and improve a corrosion resistance as well as a transmission factor of the X-rays by providing a pressure control mechanism which controls the pressure of a gas layer so that the pressure of an inner part of a laser vessel may becomes equal to that of the gas layer by receiving output of a pressure sensor. CONSTITUTION:An X-ray transmissive window part 3 is composed of: an X-ray transmissive layer 6 of a solid that is highly transmissible by X-rays; a corrosion resistance layer 8 consisting of a solid that has a high corrosion resistance to halogen gas; a gas layer 7 which is obtained by sealing a noncorrosive gas in an interval between the foregoing layers 6 and 8 then, the pressure sensor 10 is mounted to detect pressures of a laser vessel 1 as well as the gas layer 7. Further, a pressure control mechanism 9 to control the pressure of the gas layer 7 is provided so that the pressure of an inner part of the laser vessel 1 may become equal to that of the gas layer 7 by receiving output of the pressure sensor 10. The establishment of such a mechanism removes a danger of breaking the X-ray transmissive window part 3 and the state of a high transmittance of the X-rays eliminates the need for making high voltage and large amount of current flow into an X-ray generating part 2 specially. An X-ray preionized excimer laser device which makes its cathode and anode have a long life is obtained. |
