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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02240967(A)
申请公布日期
1990.09.25
申请号
JP19890063065
申请日期
1989.03.14
申请人
MITSUBISHI ELECTRIC CORP
发明人
AJIKA NATSUO;ARIMA HIDEAKI
分类号
H01L21/8247;H01L21/822;H01L27/04;H01L29/78;H01L29/788;H01L29/792
主分类号
H01L21/8247
代理机构
代理人
主权项
地址
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