| 摘要 |
<p>This invention relates to a method of producing a thin film comprising transporting ions in the direction of the thickness of a thin film in the course of the formation thereof and reacting the ions transported up to one surface of the thin film with a gas present in a reactor, wherein the rate of film formation is enhanced by removing electric charges built up on the surface of the film through a plasma formed in front of the film while applying an internal electric field in the direction of the thickness of the film. This thin film is applicable as an ion-conductive thin film of a solid electrolyte fuel cell.</p> |
