| 发明名称 |
METHOD FOR ADHESION OF DIAMOND COATING FILM |
| 摘要 |
Diamond films are deposited at substrates below temperatures of 400 DEG C by chemical vapour deposition using a high powered pulsed laser and a vapour which is an aliphatic carboxylic acid or an aromatic carboxylic anhydride. |
| 申请公布号 |
JPH02233593(A) |
申请公布日期 |
1990.09.17 |
| 申请号 |
JP19900028601 |
申请日期 |
1990.02.09 |
| 申请人 |
INTERNATL BUSINESS MACH CORP <IBM> |
发明人 |
NIIGERU PATORITSUKU HATSUKAA;JIYOOJI UIRIAMU TEINDARU |
| 分类号 |
H01L21/205;C23C16/27;C30B25/02;C30B29/04;H01L21/314 |
主分类号 |
H01L21/205 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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