| 摘要 |
<p>PURPOSE:To prevent dust particles on an exclusive quartz boat from adhering to the surfaces of semiconductor substrates at the time of a series of replacement processes by installing a dust suction mechanism. CONSTITUTION:Semiconductor substrates 1 are uplifted from a cassette 3 by a semiconductor substrate thrusting-up rod 2 from the lower part of a semiconductor substrate automatic replacing machine, are made to position at the upper part of the machine by a substrate holder 4 and in the interval, the cassette 3 under the holder 4 is replaced with an exclusive quartz boat 5 and by making a substrate holder supporting stand 6 descend, the substrates 1 are replaced on the boat 5. At that time, by actuating always a duct suction mechanism 8 installed on a cassette or exclusive quartz boat receiving stand 7, dust deposited on the boat 5 is absorbed and is prevented from being adhered on the surfaces of the substrates 1.</p> |
