| 摘要 |
PURPOSE:To attempt the high crystallization of a magnetic metallic film formed by a titled device, by providing an adhesion preventing plate having an opening between a cylindrical can and an evaporation source, and further providing adhesion preventing rollers between the can and the vicinity of the opening of the adhesion preventing plate. CONSTITUTION:A cylindrical can 11 is rotated and a high molecular film 9 is sent out from a feeding roll 10. The film is run along the surface of the can 11 and taken up on a take-up roll 12. Magnetic metallic material 19 is sputtered by a sputtering electrode 13, and vapor-deposited on the film through the opening of an adhesion preventing plate 14. At this time, vapor deposition or adhesion of sputtered material coming around is prevented by adhesion preventing rollers 15, 16 which are provided at incoming part and outgoing part of the film 9 at the opening of the adhesion preventing plate 14, and which are rotated in contact with the film 9. Consequently, the crystallinity of the vapor-deposited metallic material on the film 9 is improved. Installation of incoming side roller 15 only is also effective. |
