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发明名称
DRY ETCHING METHOD FOR AMORPHOUS SILICON
摘要
申请公布号
JPH02231716(A)
申请公布日期
1990.09.13
申请号
JP19890051923
申请日期
1989.03.06
申请人
HITACHI LTD
发明人
TAKANO TAKAO;MATSUZAKI EIJI;YORITOMI YOSHIFUMI;KOSHIMO TOSHIYUKI;NAKATANI MITSUO;KENMOCHI AKIHIRO
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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