摘要 |
PURPOSE:To easily produce a thin film having high electrical conductivity by calcining a film obtd. by coating a soln. contg. respectively specific ratios of an org. In compd. having a C bond and O bond and org. tin compd. having an O bond on a substrate and drying the coating at a specific temp. CONSTITUTION:The solvent soln. contg. 2-10wt% org. indium compd. having at least >=1 In-C bond and further at least >=1 In-O bond and 0-0.5wt% org. tin compd. having at least >=1 Sn-O bond is uniformly coated on the substrate (soda glass, etc.). The org. In compd. is synthesized of the trialkyl indium expressed by R3In and oxygen-contg. compd., where R is a straight chain, branched alkyl or aralkyl group of 1-8C. p-xylene is used for the solvent. The substrate is then dried by heating to evaporate the solvent, by which the film is obtd. The film is calcined for about 30min-1hr at 300-600 deg.C in an air atmosphere to form the thin film having high electrical conductivity. |