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发明名称
PRODUCTION OF METALLIC FILM
摘要
申请公布号
JPH02228473(A)
申请公布日期
1990.09.11
申请号
JP19890049437
申请日期
1989.03.01
申请人
OKI ELECTRIC IND CO LTD
发明人
NISHIKAWA SATORU
分类号
C23C16/14;C23C16/48;H01L21/28;H01L21/285
主分类号
C23C16/14
代理机构
代理人
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