MOLECULAR BEAM SOURCE APPARATUS,申请号JP19890047018-传众专利搜索

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发明名称	MOLECULAR BEAM SOURCE APPARATUS
摘要
申请公布号	JPH02226719(A)	申请公布日期	1990.09.10
申请号	JP19890047018	申请日期	1989.02.28
申请人	MITSUBISHI ELECTRIC CORP	发明人	MORISHITA YOSHITAKA;IMAIZUMI MASAYUKI;MARUNO SHIGEMITSU;GOTODA MITSUNOBU;NOMURA YOSHITOKU;OGATA HITOSHI
分类号	C30B23/08;H01L21/203	主分类号	C30B23/08
代理机构		代理人
主权项
地址

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