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经营范围
发明名称
FORMATION OF THIN METALLIC FILM BY CVD METHOD
摘要
申请公布号
JPH02225670(A)
申请公布日期
1990.09.07
申请号
JP19890044039
申请日期
1989.02.23
申请人
TOYOTA MOTOR CORP;TOYOTA CENTRAL RES & DEV LAB INC
发明人
FUNATSU JUN;TERADA SHIGEO
分类号
C23C16/16
主分类号
C23C16/16
代理机构
代理人
主权项
地址
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