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发明名称
ETCHING DEVICE
摘要
申请公布号
JPH02224232(A)
申请公布日期
1990.09.06
申请号
JP19890042975
申请日期
1989.02.27
申请人
HITACHI LTD
发明人
ITO YOICHI;KAKEHI YUTAKA;KAWAHARA HIRONORI
分类号
C23F4/00;H01L21/302;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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