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发明名称
APPARATUS FOR TRANSFERRING SEMI-CONDUCTOR WAFERS
摘要
申请公布号
EP0163413(B1)
申请公布日期
1990.09.05
申请号
EP19850302845
申请日期
1985.04.24
申请人
FAITH ENTERPRISES, INC.
发明人
JOHNSON, LESTER
分类号
B65G47/52;B23Q7/05;B65G1/00;B65G1/02;B65G61/00;H01L21/67;H01L21/677
主分类号
B65G47/52
代理机构
代理人
主权项
地址
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