FORMATION OF THIN FILM OF III-V COMPOUND SEMICONDUCTOR,申请号JP19890042130-传众专利搜索

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发明名称	FORMATION OF THIN FILM OF III-V COMPOUND SEMICONDUCTOR
摘要
申请公布号	JPH02221196(A)	申请公布日期	1990.09.04
申请号	JP19890042130	申请日期	1989.02.21
申请人	NEC CORP	发明人	MORI KAZUO
分类号	C30B25/02;C30B25/18;C30B29/40;H01L21/205	主分类号	C30B25/02
代理机构		代理人
主权项
地址

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