发明名称 |
Voltage measurement with an electron probe without external trigger signal |
摘要 |
Voltage measurement with a particle probe without external trigger signal. Methods and apparatus are provided for voltage measurement with a particle probe without an external trigger signal of a signal having at least one fixed frequency, fs. The known arrangements for voltage measurement with an external trigger signal remain fundamentally unaltered; however, the required trigger signal is derived from the measured signal itself.
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申请公布号 |
US4954773(A) |
申请公布日期 |
1990.09.04 |
申请号 |
US19880227304 |
申请日期 |
1988.07.28 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
BRUST, HANS D. |
分类号 |
G01R19/00;G01R31/302;G01R31/305;H01L21/66 |
主分类号 |
G01R19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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