发明名称 Voltage measurement with an electron probe without external trigger signal
摘要 Voltage measurement with a particle probe without external trigger signal. Methods and apparatus are provided for voltage measurement with a particle probe without an external trigger signal of a signal having at least one fixed frequency, fs. The known arrangements for voltage measurement with an external trigger signal remain fundamentally unaltered; however, the required trigger signal is derived from the measured signal itself.
申请公布号 US4954773(A) 申请公布日期 1990.09.04
申请号 US19880227304 申请日期 1988.07.28
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 BRUST, HANS D.
分类号 G01R19/00;G01R31/302;G01R31/305;H01L21/66 主分类号 G01R19/00
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