| 发明名称 |
HANDOTAIZAIRYOOYOBISONOSEIZOHOHO |
| 摘要 |
A semi-conductor material comprising amorphous silicon containing 0.001 to 5 atom % aluminum and containing hydrogen incorporated therein, which is of an n-type or i-type in its conductive form, and a process for its production. |
| 申请公布号 |
JPH0239087(B2) |
申请公布日期 |
1990.09.04 |
| 申请号 |
JP19810151423 |
申请日期 |
1981.09.26 |
| 申请人 |
KONISHIROKU PHOTO IND |
发明人 |
SATO SHIGERU;SHINDO MASANARI;OOTA TATSUO;SHIMA TETSUO;MYOKAN ISAO |
| 分类号 |
C23C16/30;C01B33/02;C23C14/00;H01L21/203;H01L29/04;H01L29/167;H01L31/02;H01L31/04 |
主分类号 |
C23C16/30 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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