发明名称 COOLING STRUCTURE OF SWITCHING ELEMENT OF DISCHARGE EXCITING GAS LASER DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a cooling structure of a switching element wherein a cabinet is miniaturized and width of pulses to be applied to a magnetic pulse compression circuit can be reduced. SOLUTION: Semiconductor switches SW1-SW4 are fixed on insulating plates 2, 2', which are cooled by using a water cooling plate 3. Partitions 2a-2c, 2a'-2c' which are constituted of insulating members are arranged in the peripheral parts of the semiconductor switches SW1-SW4. Consequently, creeping distance between the semiconductor switches SW1-SW4 and the water cooling plate 3 can be ensured without enlarging the insulating plates 2, 2', and length of a wiring W can be reduced. Hence, floating inductance generated in the wiring W can be reduced, and width of pulses to be applied to a magnetic pulse compression circuit can be reduced. By arranging the partitions between end portions of the insulating plates 2, 2' of the wiring leading-out side and the semiconductor switches, the wiring W can be more shortened, and floating inductance can be reduced.
申请公布号 JP2002016307(A) 申请公布日期 2002.01.18
申请号 JP20000195551 申请日期 2000.06.29
申请人 USHIO INC 发明人 YAMAMORI KENJI;INOUE TOYOJI
分类号 H01L23/473;H01S3/041;H01S3/097;(IPC1-7):H01S3/097 主分类号 H01L23/473
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