| 摘要 |
PURPOSE:To suppress an increase in a reactive region due to output electrode and to facilitate forming steps by forming a semiconductor optical active layer and a rear face electrode, then irradiating a position opposed to an insulating member on the rear face electrode with an energy beam to form the electrode. CONSTITUTION:A conductive member 13 extended in a stripe state along the end of a transparent electrode 10a is formed on the electrode 10a, a stripe part extended in a stripe state inside the member 13 along the member 13 and an insulating member 14 made of a covering part covering part of the end of the member 13 are formed on the electrode 10a. Then, after semiconductor optical active layers 15a, 15b and rear face electrodes 16a, 16b are formed to cover the members 13, 14, a position opposed to the member 14 is radiated with an energy beam from above the electrodes 16a, 16b to form output electrodes 5 isolated from the electrodes 16a, 16b, and a position opposed to the member 13 is radiated with the beam to electrically connect the electrodes 5 to the member 13, thereby forming output electrodes 4, 5. Thus, a reactive region is reduced, and forming steps are facilitated. |
