HEAT-STABLE POSITIVE PHOTORESIST,申请号EP19890119254-传众专利搜索

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发明名称	HEAT-STABLE POSITIVE PHOTORESIST
摘要
申请公布号	EP0364949(A3)	申请公布日期	1990.08.29
申请号	EP19890119254	申请日期	1989.10.17
申请人	CIBA-GEIGY AG	发明人	BARTMANN, EKKEHARD, DR.;SCHULZ, REINHARD, DR.;MUNZEL, HORST, DR.
分类号	G03F7/004;G03F7/022;H01L21/027;(IPC1-7):G03F7/022	主分类号	G03F7/004
代理机构		代理人
主权项
地址

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