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发明名称
INTEGRATED CIRCUIT FABRICATION, INCLUDING LOW TEMPERATURE METHOD FOR MAKING SILICIDE STRUCTURES
摘要
申请公布号
EP0366343(A3)
申请公布日期
1990.08.29
申请号
EP19890310697
申请日期
1989.10.18
申请人
AMERICAN TELEPHONE AND TELEGRAPH COMPANY
发明人
CHEN, MIN-LIANG;LEUNG, CHUNG WAI;MARTIN, EDWARD P., JR.
分类号
H01L21/316;H01L21/768;H01L23/522;H01L29/78;(IPC1-7):H01L21/336;H01L21/310
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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