| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface acoustic wave element, having enhanced power resistance performance in which resonance frequency f and resonance frequency differenceΔf can be controlled to arbitrary values, flexibility is high at designing of a SAW resonator, and as a result, attenuation of pass band and block band can be controlled, when it is used as a surface acoustic wave filter. SOLUTION: A diamond layer 12, a metal layer 13 and a ZnO layer 14 are formed on an Si substrate 11, an SAW resonator 17 comprising a pair of facing interdigital electrodes 15 and 16 and grating reflectors 21 and 22 are formed on the ZnO layer 14, and an SiO2 layer 23 is formed thereon. If the wavelength of surface acoustic wave being excited is defined asλ, a standardized film thickness (2π/λ×HZn0 ) of the ZnO layer 14 is set in the range of 0.5-1.3, and standardized film thickness (2π/λ×HSi O2 ) of the SiO2 layer 23 is set in the range of 0-1.0.
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