| 摘要 |
<p>PURPOSE:To obtain a hot wire type flow rate sensor which has small thermal inertia by forming a hot wire by winding a barlike or tubular base, obtained by providing metal having large thermal conductivity with an insulating film, with a linear resistance body in a coil shape. CONSTITUTION:On the outer circumferential surface of a tubular metallic base 2221, an insulating film 2222 is formed, a linear resistance body 2223 is wound around the film in a coil shape, and a protective film 2224 is formed on it. At one end of the tubular metallic base 2221, an electrode 2225 is provided. The metallic base 2221 for a hot-wire resistance body 2220, constituted as mentioned above, uses a stainless steel tube which has a 0.2phimm. external diameter, a 0.1phimm. internal diameter, and 5mm. length. As the insulating film 2222, a heat-resistive ceramic film is coated and baked. As the protective film 2224, a glass material is coated and baked; the insulating film 2222 has 50mum thickness and the protective film 2224 has 15mum thickness.</p> |
