发明名称 POSITIONING MECHANISM FOR BLOCK IN SURFACE POLISHING DEVICE
摘要 PURPOSE:To separate a block from a center roller simply and to execute polishing with good accuracy of the work held on the block without damaging or deforming the center roller and a guide roller by the block by providing a recessed part on the center roller. CONSTITUTION:A block 5 is fed one by one onto a surface plate 2 by holding a center roller 7 at the positioning position, this block is moved by rotating the surface plate, guide rollers 21a-21d are turned to a support position selectively as well, the block is supported in order by the abutting part of the guide roller and center roller and the positioning of each block is executed. After completion of this positioning, the center roller is turned to a work position and the recessed part 11b of the center roller is opposed to the block. The center roller and block are mutually separated by this recessed part and the block is released from the friction state with the center roller. The work held on the block is then subjected to polishing by the difference in the peripheral speeds of the inner and outer peripheries of the surface plate 2.
申请公布号 JPH02212072(A) 申请公布日期 1990.08.23
申请号 JP19890030754 申请日期 1989.02.09
申请人 SPEEDFAM CO LTD 发明人 FURUSAWA SHIRO
分类号 B24B37/04;B24B37/30;H01L21/304 主分类号 B24B37/04
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