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发明名称
PRODUCTION OF COMPOUND SEMICONDUCTOR CRYSTAL AND PRODUCING DEVICE
摘要
申请公布号
JPH02212395(A)
申请公布日期
1990.08.23
申请号
JP19890031935
申请日期
1989.02.10
申请人
FURUKAWA ELECTRIC CO LTD:THE
发明人
YOSHIDA KIYOTERU;KIJIMA TAKASHI;OZAWA SHOICHI;KIKUTA TOSHIO
分类号
C30B27/02;H01L21/208
主分类号
C30B27/02
代理机构
代理人
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地址
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