CAPACITANCE INDUCTION ASSEMBLY FOR PART

摘要

PURPOSE: To detect matching information or one parts to another by using geometrical constitutions of two objects distant from each other and the correspondence between their mutual capacitances. CONSTITUTION: A small and coaxially guarded moving probe 13 is put above a large metallic plate 20 with a narrow gap between them, and the conductive chip of the probe 13 is insulated from its earthed main body. A radio frequency oscillator 10 and an operation integral preamplifier 11 measure the capacitance between the chip of the probe 13 and the plate 20. This capacitance is increased when a detector package 16 is placed in the area between the probe 13 and the plate 20 closely to the probe 13. The movement parallel with the plate 20 and the package 16 generates the measured capacitance change corresponding to a surface topography or the package just under the probe 13. Thus, matching measurement between parts is performed more surely.