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发明名称
WIRING SYSTEM OF LSI
摘要
申请公布号
JPH02207550(A)
申请公布日期
1990.08.17
申请号
JP19890026594
申请日期
1989.02.07
申请人
TOSHIBA CORP
发明人
YAMADA MASAAKI
分类号
H01L21/82;G06F17/50
主分类号
H01L21/82
代理机构
代理人
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地址
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